Concepedia

Publication | Closed Access

μ-Raman spectroscopy and FE-modeling for TSV-Stress-characterization

DOI

26

Citations

16

References

2015

Year

P. Saettler, M. Hecker, M. Boettcher, Catharina Rudolph, Klaus‐Jürgen Wolter
Microelectronic Engineering

References

YearCitations

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