Concepedia

M. Boettcher

MB

4

Publications

67

Citations

4

H-Index

2012

Active since

Affiliations

Technische Universität Dresden(Current)

GlobalFoundries (Germany)

Fraunhofer Institute for Reliability and Microintegration

M. Boettcher is an author at Technische Universität Dresden specializing in materials science, engineering, and materials engineering.

Top concepts

EngineeringMaterial ScienceMicrostructureApplied PhysicsMicroelectronicsElectronic PackagingMaterials EngineeringElectrical EngineeringCorrosionThin Films

Publications per year

2012–2021

4

Publications

4

μ-Raman spectroscopy and FE-modeling for TSV-Stress-characterization

P. Saettler, M. Hecker, M. Boettcher et al. · Microelectronic Engineering · 2015 · 26 citations

Materials Science, Surface Characterization, Spectroscopy +3

Characterization of the annealing behavior for copper-filled TSVs

P. Saettler, M. Boettcher, K.-J. Wolter · 2012 · 20 citations

Engineering, Severe Plastic Deformation, Silicon Vias +17

High Quality Integrated Inductor in Fan-out Wafer-Level Packaging Technology for mm-Wave Applications

Kavin Senthil Murugesan, Mykola Chernobryvko, Sherko Zinal et al. · 2021 · 11 citations

Electrical Engineering, Chip-scale Package, Engineering +12

Bath chemistry and copper overburden as influencing factors of the TSV annealing

P. Saettler, M. Boettcher, Catharina Rudolph et al. · 2013 · 10 citations

Engineering, Severe Plastic Deformation, Mechanical Engineering +16

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