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EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationPolymer MaterialsMems DesignMems FabricationMems MaterialsMems PackagingPolymer ProcessingPolymer ProductionMulti-user InteractionPolymers In Mems Fabrication
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Silicon as a mechanical material
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SU-8: a low-cost negative resist for MEMS
H. Lorenz, M. Despont, N. Fahrni et al. · Journal of Micromechanics and Microengineering · 1997 · 972 citations · Full text