Wet KOH etching of freestanding AlN single crystals

An aluminium nitride light-emitting diode with a wavelength of 210 nanometres

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Substrates for gallium nitride epitaxy

L. Liu, James H. Edgar · Materials Science and Engineering R Reports · 2002 · 809 citations

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III–Nitride UV Devices

M. Asif Khan, M. Shatalov, H. P. Maruska et al. · Japanese Journal of Applied Physics · 2005 · 420 citations · Full text

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Etching roughness for (100) silicon surfaces in aqueous KOH

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Recent advances in defect-selective etching of GaN

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