Concepedia

Publication | Closed Access

Effect of substrate charging on the reliability of capacitive RF MEMS switches

DOI

37

Citations

15

References

2008

Year

P. Czarnecki, Xavier Rottenberg, Philippe Soussan, P. Ekkels, Philippe Müller, P. Nolmans, W. De Raedt, H.A.C. Tilmans, Robert Puers, L. Marchand,
Sensors and Actuators A Physical

References

YearCitations

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