Superlattices and Microstructures · 1996 · 33 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologySurface ScienceAtomic Force MicroscopyMask FabricationScanning Probe MicroscopySoft LithographySurface MicroscopyThin Film LithographyAtomic Force Microscopy Surface AnalysisSurface Topography MappingTip-sample Adhesion