Concepedia

Silicon–glass wafer bonding with silicon hydrophilic fusion bonding technology

Zhixiong Xiao, Guoying Wu, Zhihong Li, Guobing Zhang, Yilong Hao, Yangyuan Wang

Sensors and Actuators A Physical · 1999 · 39 citations · 13 references

DOI

Concepts

References

13

Bonding of silicon wafers for silicon-on-insulator

W. Maszara, Georges Goetz, A.L. Caviglia et al. · Journal of Applied Physics · 1988 · 861 citations

, , +17

Field Assisted Glass-Metal Sealing

George Wallis, D. Pomerantz · Journal of Applied Physics · 1969 · 730 citations

, , +7

Silicon-to-silicon direct bonding method

Masaru Shimbo, K. Furukawa, K. Fukuda et al. · Journal of Applied Physics · 1986 · 507 citations

, , +17

Slow fracture model based on strained silicate structures

Terry A. Michalské, Bruce C. Bunker · Journal of Applied Physics · 1984 · 299 citations

, , +17

Low temperature wafer direct bonding

Qin‐Yi Tong, G. Cha, R. Gafiteanu et al. · Journal of Microelectromechanical Systems · 1994 · 193 citations

, , +16