Concepedia

W. Maszara

WM

Statistics

Publications

30

Citations

1.9K

H-Index

20

Active since

1984

Affiliations

North Carolina State University(Current)

Advanced Micro Devices (United States)

GlobalFoundries (United States)

MCNC Research and Development Institute

GlobalFoundries (Germany)

W. Maszara is an author at North Carolina State University specializing in engineering, semiconductor devices, and materials science.

Publications per year

1984–2014

30

Publications

30

Bonding of silicon wafers for silicon-on-insulator

W. Maszara, Georges Goetz, A.L. Caviglia et al. · Journal of Applied Physics · 1988 · 861 citations

Engineering, Materials Engineering, Materials Science +17

Residual defects following rapid thermal annealing of shallow boron and boron fluoride implants into preamorphized silicon

C. Carter, W. Maszara, D. K. Sadana et al. · Applied Physics Letters · 1984 · 104 citations

Engineering, Materials Engineering, Materials Science +17

Electron and hole trapping in irradiated SIMOX, ZMR and BESOI buried oxides

Robert E. Stahlbush, G.J. Campisi, J.B. McKitterick et al. · IEEE Transactions on Nuclear Science · 1992 · 96 citations

Engineering, Materials Engineering, Materials Science +15

Role of surface morphology in wafer bonding

W. Maszara, B-L. Jiang, A. Yamada et al. · Journal of Applied Physics · 1991 · 81 citations

Engineering, Materials Engineering, Materials Science +17

Paramagnetic defect centers in BESOI and SIMOX buried oxides

W. L. Warren, M.R. Shaneyfelt, J.R. Schwank et al. · IEEE Transactions on Nuclear Science · 1993 · 77 citations

Engineering, Materials Engineering, Materials Science +17

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