G. Cha

Low temperature wafer direct bonding

Qin‐Yi Tong, G. Cha, R. Gafiteanu et al. · Journal of Microelectromechanical Systems · 1994 · 193 citations

Engineering, Materials Engineering, Materials Science +16

Denuded zone formation in carbon-implanted silicon and its application to device quality silicon-on-insulator preparation

Qiaoling Tong, H.-M. You, G. Cha et al. · Applied Physics Letters · 1993 · 16 citations

Engineering, Materials Engineering, Materials Science +17

Simultaneous measurement of six layers in a silicon on insulator film stack using spectrophotometry and beam profile reflectometry

J. M. Leng, John J. Sidorowich, Y. D. Yoon et al. · Journal of Applied Physics · 1997 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +17