Publication | Closed Access
Low-dislocation relaxed SiGe grown on an effective compliant substrate
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Citations
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References
2000
Year
Materials EngineeringEngineeringDislocation InteractionMicrofabricationMechanical EngineeringApplied PhysicsSemiconductor Device FabricationElectronic PackagingEffective Compliant SubstrateMicroelectronicsSilicon On Insulator
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