Journal of Micromechanics and Microengineering · 2010 · 60 citations · 26 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMicrofabricationMicrowave EngineeringMicrofabrication MaterialsMicrofabrication ProcessesMicrowave AmplifiersMillimeter-wave CommunicationsSoft LithographySubstrate PreparationDeep Ultraviolet LithographyDevice FabricationExtreme Ultraviolet LithographyLiga ProcessMillimeter-wave Integrated CircuitsPhotolithographyPhotoresist Sacrificial LayersPhotoresists
Microfabrication techniques have been developed using ultraviolet photolithography (UV-LIGA) with SU-8 photoresists to create advanced sheet beam amplifier circuits for the next generation of vacuum electron traveling wave amplifiers in the 210–220 GHz (G-band) frequency regime. We describe methods that have led to successfully fabricated millimeter wave circuits, including applying ultra-thick SU-8 photoresist layers on copper, copper electroforming solutions, and the challenging removal of the SU-8 photoresists. A table of experimental liquid SU-8 removal chemistries and results is also presented.
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