Control of silicon network structure in plasma deposition - Concepedia

Concepedia

Publication | Closed Access

Control of silicon network structure in plasma deposition

246

Citations

6

References

1989

Year

C. C. Tsai, G. B. Anderson, R. Thompson, B. Wacker

Journal of Non-Crystalline Solids

Electrical EngineeringEngineeringMicrofabricationApplied PhysicsSilicon Network StructurePlasma EtchingPlasma Processing

References

	Year	Citations

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