Concepedia

R. Thompson

RT

15

Publications

756

Citations

11

H-Index

1963

Active since

Affiliations

Palo Alto Research Center(Current)

University of Strathclyde

Massachusetts Institute of Technology

Soitec (France)

RTX (United States)

R. Thompson is an author at Palo Alto Research Center specializing in engineering, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsElectrical EngineeringPhysicsMaterial ScienceIntegrated CircuitsHydrogenMicrofabricationElectronic Packaging

Publications per year

1963–2013

15

Publications

15

Control of silicon network structure in plasma deposition

C. C. Tsai, G. B. Anderson, R. Thompson et al. · Journal of Non-Crystalline Solids · 1989 · 246 citations

Electrical Engineering, Engineering, Microfabrication +4

High Temperature Silicon Carbide CMOS Integrated Circuits

David Clark, Ewan P. Ramsay, A.E. Murphy et al. · Materials science forum · 2011 · 88 citations

Electrical Engineering, High Temperature Materials, Engineering +13

Low temperature growth of epitaxial and amorphous silicon in a hydrogen-diluted silane plasma

C. C. Tsai, G. B. Anderson, R. Thompson · Journal of Non-Crystalline Solids · 1991 · 68 citations

Physics, Applied Physics, Low Temperature Growth +5

Transition from Amorphous to Crystalline Silicon: Effect of Hydrogen on Film Growth

C. C. Tsai, R. Thompson, C. Doland et al. · MRS Proceedings · 1988 · 63 citations

Materials Science, Engineering, Applied Physics +5

Monolithic integration of InP-based transistors on Si substrates using MBE

W.K. Liu, D. Lubyshev, J. M. Fastenau et al. · Journal of Crystal Growth · 2008 · 59 citations

Electrical Engineering, Wafer Scale Processing, Engineering +9

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