Low temperature growth of epitaxial and amorphous silicon in a hydrogen-diluted silane plasma - Concepedia

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Low temperature growth of epitaxial and amorphous silicon in a hydrogen-diluted silane plasma

68

Citations

4

References

1991

Year

C. C. Tsai, G. B. Anderson, R. Thompson

Journal of Non-Crystalline Solids

PhysicsApplied PhysicsLow Temperature GrowthAmorphous SiliconHydrogen-diluted Silane PlasmaAmorphous SolidSilicon On InsulatorEpitaxial Growth

References

	Year	Citations

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