Microbridge testing of silicon nitride thin films deposited on silicon wafers

Mechanical properties of thin films

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Natural Sciences, Materials Engineering, Materials Science +15

Theory of Dislocations (2nd ed.)

J. P. Hirth, J. Lothe, T. Mura · Journal of Applied Mechanics · 1983 · 2K citations · Full text

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Measurement of Thin Film Mechanical Properties Using Nanoindentation

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Influences of pileup on the measurement of mechanical properties by load and depth sensing indentation techniques

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A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films

Joost J. Vlassak, William D. Nix · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 698 citations

Natural Sciences, Materials Engineering, Materials Science +10