Concepedia

Microbridge Release

Microbridge Release is a sacrificial layer processing technique in microfabrication where a temporary underlying layer is selectively etched to release a suspended microscale bridge structure, enabling the formation of freestanding mechanical elements in microelectromechanical systems (MEMS).

7

Publications

270

Citations

28

Authors

8

Institutions

Publications per year

2017–2026

0

Parents

Publications

7

Microbridge testing of silicon nitride thin films deposited on silicon wafers

T.-Y Zhang, Yanjing Su, Chen Qian et al. · Acta Materialia · 2000 · 128 citations

, , +16

Thermal assembly of polysilicon microstructures

Gary K. Fedder, Roger T. Howe · 2002 · 56 citations

, , +17

Microbridge testing of silicon oxide/silicon nitride bilayer films deposited on silicon wafers

Yanjing Su, Chen Qian, Minghao Zhao et al. · Acta Materialia · 2000 · 41 citations

, , +16

Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates

S. Vicknesh, S. Tripathy, Vivian Kaixin Lin et al. · Applied Physics Letters · 2007 · 13 citations

, , +17

Deformation control of microbridges for flow sensors

T. Matsuura, Motohisa Taguchi, Kaoru Kawata et al. · Sensors and Actuators A Physical · 1997 · 11 citations

, , +13

1–5 of 7

Authors

28

  1. CQ
    Chen Qian

    State Key Laboratory of Automotive Simulation and Control

    2 publications · 169 citations

    2

    h-index

  2. YS
    Yanjing Su

    University of Science and Technology Beijing, China

    2 publications · 169 citations

    2

    h-index

  3. TZ
    T.-Y. Zhang

    Hong Kong University of Science and Technology, Hong Kong SAR China

    1 publications · 41 citations

    1

    h-index

  4. BK
    Bhupendra Kumar

    National University of Singapore, Singapore

    1 publications · 13 citations

    1

    h-index

  5. DC
    Dong‐il Cho

    Seoul National University, South Korea

    1 publications · 10 citations

    1

    h-index

1–5 of 28

Institutions

8

  1. Hong Kong University of Science and Technology

    Hong Kong, Hong Kong

    3 h-index

    12 publications

    837 citations

  2. Seoul National University

    Seoul, South Korea

    1 h-index

    6 publications

    60 citations

  3. Dankook University

    Jukjeon-dong, South Korea

    1 h-index

    1 publications

    10 citations

  4. University of Hong Kong

    Pok Fu Lam, Hong Kong

    1 h-index

    3 publications

    33 citations

  5. Institute of Materials Research and Engineering

    Singapore, Singapore

    1 h-index

    4 publications

    52 citations

  6. National University of Singapore

    Singapore, Singapore

    1 h-index

    2 publications

    26 citations

  7. Mitsubishi Electric (Japan)

    Tokyo, Japan

    1 h-index

    4 publications

    44 citations

  8. University of California, Berkeley

    Berkeley, United States

    1 h-index

    2 publications

    112 citations

1–8 of 8

Venues

  1. Acta Materialia

    2 publications · 169 citations

    2

    h-index

  2. Applied Physics Letters

    1 publications · 13 citations

    1

    h-index

  3. Japanese Journal of Applied Physics

    JJAP · 1 publications · 10 citations

    1

    h-index

  4. Sensors and Actuators A Physical

    1 publications · 11 citations

    1

    h-index

  5. Materials Science and Engineering A

    1 publications · 11 citations

    1

    h-index

1–5