Multi-range silicon micromachined flow sensor

Anemometer with hot platinum thin film

F. Mailly, R. Bonnot, Pierre Temple‐Boyer et al. · Sensors and Actuators A Physical · 2001 · 204 citations

Engineering, Materials Science, Physics +11

Micro-liquid flow sensor

Theo Lammerink, Niels R. Tas, J.H.J. Fluitman · Sensors and Actuators A Physical · 1993 · 201 citations · Full text

Wide range semiconductor flow sensors

A. Glaninger, A. Jachimowicz, F. Köhl et al. · Sensors and Actuators A Physical · 2000 · 106 citations

Engineering, Chemical Engineering, Electrical Engineering +12

A polysilicon flow sensor for gas flow meters

Tokudai Neda, Kenichi Nakamura, Tsugihiko Takumi · Sensors and Actuators A Physical · 1996 · 95 citations

Engineering, Chemical Engineering, Instrumentation +13

Thermal flow micro sensors

Michael Curt Elwenspoek · 2003 · 91 citations

Engineering, Mechanical Engineering, Fluid Dynamics +14