Anemometer with hot platinum thin film

Residual stress in low pressure chemical vapor deposition SiNx films deposited from silane and ammonia

P. Temple‐Boyer, Carole Rossi, E. Saint-Etienne et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 170 citations

Natural Sciences, Materials Engineering, Materials Science +17

Silicon thermal flow sensors

B.W. van Oudheusden · Sensors and Actuators A Physical · 1992 · 169 citations

Engineering, Mechanical Engineering, Heat Transfer +10

A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications

R. G. Johnson, Robert E. Higashi · Sensors and Actuators · 1987 · 141 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

Effects of anneal ambients and Pt thickness on Pt/Ti and Pt/Ti/TiN interfacial reactions

J. O. Olowolafe, Robert E. Jones, A. C. Campbell et al. · Journal of Applied Physics · 1993 · 141 citations

Natural Sciences, Materials Engineering, Materials Science +12

Wide range semiconductor flow sensors

A. Glaninger, A. Jachimowicz, F. Köhl et al. · Sensors and Actuators A Physical · 2000 · 106 citations

Engineering, Chemical Engineering, Electrical Engineering +12