Concepedia

E. Saint-Etienne

ES

2

Publications

190

Citations

2

H-Index

1998

Active since

Affiliations

Centre National de la Recherche Scientifique(Current)

Laboratoire d'Analyse et d'Architecture des Systèmes

E. Saint-Etienne is an author at Centre National de la Recherche Scientifique specializing in engineering, thin films, and materials engineering.

Top concepts

EngineeringThin FilmsApplied PhysicsMaterial ScienceMicroelectronicsMicrofabricationOptical MaterialsMaterials Engineering

Publications per year

1998–1998

2

Publications

2

Residual stress in low pressure chemical vapor deposition SiNx films deposited from silane and ammonia

P. Temple‐Boyer, Carole Rossi, E. Saint-Etienne et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 169 citations

Materials Engineering, Materials Science, Optical Materials +13

A dedicated micromachining technology for high-aspect-ratio millimetre-wave circuits

E. Saint-Etienne, P. Pons, G. Blasquez et al. · Sensors and Actuators A Physical · 1998 · 21 citations

Dedicated Micromachining Technology, Engineering, Micromachines +4

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