E. Saint-Etienne - Concepedia

Author

E. Saint-Etienne

Also Known As

E. Saint-Etienne, Saint-Etienne, Eric

Publications

195

Citations

H-Index

Concepts

All Affiliations

E. Saint-Etienne is an author at Centre National de la Recherche Scientifique specializing in engineering, thin films, and materials engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	190
2	Applied Physics	1	1	169
3	Materials Engineering	1	1	169
4	Materials Science	1	1	169
5	Microelectronics	1	1	21

E. Saint-Etienne

Publications

190

Citations

H-Index

Page 1

	Year	Citations
Residual stress in low pressure chemical vapor deposition SiNx films deposited from silane and ammonia P. Temple‐Boyer, Carole Rossi, E. Saint-Etienne, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials EngineeringMaterials ScienceOptical MaterialsEngineeringVaried Sinx Films	1998	169
A dedicated micromachining technology for high-aspect-ratio millimetre-wave circuits E. Saint-Etienne, P. Pons, G. Blasquez, Sensors and Actuators A Physical Dedicated Micromachining TechnologyEngineeringMicromachinesMicrofabricationMicroelectronics	1998	21

Page 1