Silicon thermal flow sensors

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Thermal sensors based on the seebeck effect

A.W. van Herwaarden, P.M. Sarro · Sensors and Actuators · 1986 · 456 citations

Engineering, Materials Engineering, Materials Science +14

Design and calibration of a microfabricated floating-element shear-stress sensor

Martin A. Schmidt, Roger T. Howe, S.D. Senturia et al. · IEEE Transactions on Electron Devices · 1988 · 202 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +14

A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications

R. G. Johnson, Robert E. Higashi · Sensors and Actuators · 1987 · 141 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

Integrated thermopile sensors

A.W. van Herwaarden, D.C. van Duyn, B.W. van Oudheusden et al. · Sensors and Actuators A Physical · 1990 · 120 citations