A polysilicon flow sensor for gas flow meters

A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications

R. G. Johnson, Robert E. Higashi · Sensors and Actuators · 1987 · 141 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

An integrated mass flow sensor with on-chip CMOS interface circuitry

Eui-Sung Yoon, K.D. Wise · IEEE Transactions on Electron Devices · 1992 · 130 citations

Engineering, Automotive Engineering, Electrical Engineering +17

Piezoresistive properties of polycrystalline silicon

John Y. W. Seto · Journal of Applied Physics · 1976 · 97 citations

Engineering, Materials Engineering, Materials Science +16

A monolithic gas flow sensor with polyimide as thermal insulator

G.N. Stemme · IEEE Transactions on Electron Devices · 1986 · 58 citations

Engineering, Mechanical Engineering, Heat Transfer +16

Lightly-doped polysilicon bridge as a flow meter

Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1988 · 52 citations

Engineering, Electrical Engineering, Fluid Dynamics +10