<i>Ex-situ</i> investigation of indium segregation in InGaAs/GaAs quantum wells using high-resolution x-ray diffraction

Abstract

Calculations using the dynamical theory of diffraction together with a sample model which considers the segregation of indium atoms were employed to fit the high-resolution x-ray spectra of strained InGaAs/GaAs quantum wells grown by molecular-beam epitaxy. The segregation coefficients obtained from the best fits to the experimental data of samples grown at different temperatures are in excellent agreement with the expected values and confirm that x-ray diffraction is a valuable tool for the investigation of the segregation phenomenon.