Fabrication of a micro-optical coupling structure by laser ablation

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

Engineering, Materials Engineering, Materials Science +16

Polymer waveguide devices with passive pigtailing: an application of LIGA technology

Hans-Dieter Bauer, W. Ehrfeld, Michael Harder et al. · Synthetic Metals · 2000 · 51 citations

Engineering, Materials Engineering, Materials Science +12

Improvement of sidewall roughness in deep silicon etching

M. Chabloz, Yuichi Sakai, T. Matsuura et al. · Microsystem Technologies · 2000 · 49 citations

Engineering, Electrical Engineering, Materials Science +12

DEEMO: a new technology for the fabrication of microstructures

J. Elders, Henri Jansen, W. Ehrfeld · 2005 · 42 citations · Full text

Engineering, Manufacturing Engineering, Materials Science +15