Polymer waveguide devices with passive pigtailing: an application of LIGA technology

Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics

W. Ehrfeld, H. Lehr · Radiation Physics and Chemistry · 1995 · 189 citations

Engineering, Materials Engineering, Materials Science +12

Three-dimensional microfabrication using synchrotron radiation

W. Ehrfeld, D. Münchmeyer · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1991 · 127 citations

Engineering, Manufacturing Engineering, Physics +10

<title>Polymer waveguides for telecom, datacom, and sensor applications</title>

Thomas Paatzsch, Ingo Smaglinski, Hans-Dieter Bauer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 18 citations

Engineering, Materials Engineering, Materials Science +17

Comparison of different polymeric multimode star couplers for backplane optical interconnect

David Israël, Roel Baets, M.J. Goodwin et al. · Journal of Lightwave Technology · 1995 · 17 citations

Engineering, Electrical Engineering, Materials Science +15