M. Chabloz

CMOS compatible fully integrated Mach-Zehnder interferometer in SOI technology

P. Dainesi, A. Küng, M. Chabloz et al. · IEEE Photonics Technology Letters · 2000 · 93 citations · Full text

Engineering, Device Integration, Silicon On Insulator +16

Improvement of sidewall roughness in deep silicon etching

M. Chabloz, Yuichi Sakai, T. Matsuura et al. · Microsystem Technologies · 2000 · 49 citations

Engineering, Microfabrication, Surface Science +6

A method to evade microloading effect in deep reactive ion etching for anodically bonded glass-silicon structures

M. Chabloz, Jiancao Jiao, Y. Yoshida et al. · 2002 · 25 citations

Engineering, Glass-silicon Structures, Silicon On Insulator +16

Silicon micro optical switching device with an electromagnetically operated cantilever

T. Matsuura, Tatsuya Fukami, M. Chabloz et al. · Sensors and Actuators A Physical · 2000 · 22 citations

Photonics, Electrical Engineering, Engineering +7