Oxidation of etched silicon in air at room temperature; Measurements with ultrasoft X-ray photoelectron spectroscopy (ESCA) and neutron activation analysis - Concepedia

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Oxidation of etched silicon in air at room temperature; Measurements with ultrasoft X-ray photoelectron spectroscopy (ESCA) and neutron activation analysis

54

Citations

9

References

1983

Year

G. Mende, J. Finster, Daniel Flamm, Dietmar Schulze

Surface Science

Materials ScienceRoom TemperatureEngineeringEtched SiliconOxidation ResistanceSurface ScienceApplied PhysicsVacuum DeviceSilicon On InsulatorActivation Analysis

References

	Year	Citations

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