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Observation of Etching of n-Type Silicon in Aqueous HF Solutions
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1967
Year
Materials ScienceMaterials EngineeringWafer Scale ProcessingEngineeringMicrofabricationSurface ScienceApplied PhysicsN-type SiliconSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsPlasma EtchingPlasma Processing
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