IEEE Circuits and Devices Magazine · 2001 · 195 citations · 37 references
EngineeringComputer EngineeringElectrical EngineeringHeat TransferMicroelectronicsSemiconductor DevicesDevice ReliabilityDevice ScalingIntegrated Circuit DesignInterconnect DesignInterconnect TechnologySemiconductor ReliabilityElectrostatic DischargeInterconnect OptimizationInterconnect ReliabilityInterconnect ScalingInterconnect Thermal ManagementThermal CharacteristicsThermal EffectsThermal Effects In Integrated Circuits
The article analyzes thermal effects from self‑heating in advanced high‑performance VLSI interconnects under various circuit conditions, including electrostatic discharge. The study examines how Cu, low‑k, and scaling factors alter interconnect thermal behavior and electromigration reliability, accounting for increased resistivity with shrinking dimensions and finite barrier thickness, to inform robust deep‑sub‑micron design guidelines. The analysis shows how these thermal effects influence driver sizing and repeater spacing on global‑tier signal lines, and quantifies reliability impacts on minimum‑sized vias in optimally buffered nets.
This article presents a comprehensive analysis of the thermal effects in advanced high-performance VLSI interconnect systems arising due to self-heating under various circuit conditions, including electrostatic discharge (ESD). Technology (Cu, low-k, etc.) and scaling effects on the thermal characteristics of the interconnects, and on their electromigration (EM) reliability, have been analyzed simultaneously, which have important implications for providing robust and aggressive deep sub-micron (DSM) interconnect design guidelines. The analysis takes into account the effects of increasing interconnect (Cu) resistivity with decreasing line dimensions and the effect of a finite barrier metal thickness. Furthermore, the impact of these thermal effects on the design (driver sizing) and optimization of the interconnect length between repeaters at the global-tier signal lines are investigated. Finally, the reliability implications for minimum-sized vias in optimally buffered signal nets will also be quantified.
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Electromagnetic Waves and Radiating Systems
Edward C. Jordan, C. L. Andrews · American Journal of Physics · 1951 · 1.2K citations
Interconnect scaling-the real limiter to high performance ULSI
M. Bohr · 2002 · 549 citations