Publication | Closed Access
Do oxygen molecules contribute to oxygen diffusion and thermal donor formation in silicon?
42
Citations
34
References
1989
Year
EngineeringSurface ScienceApplied PhysicsPhysical ChemistryOxygen MoleculesThermodynamicsChemistryThermal Donor FormationSilicon On InsulatorCharge Carrier TransportChemical Kinetics
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