Applied Physics A · 1989 · 42 citations · 34 references
EngineeringMaterials EngineeringMaterials ScienceInorganic ChemistryMaterials ChemistrySemiconductor MaterialsCarrier TransportDiffusion In SolidsOxygen TransferOxygen TransportSilicon MaterialsThermal Properties Of SemiconductorsOxygen DiffusionOxygen Transport KineticsOxygen Vacancy FormationSilicon Thermal PropertiesThermally Activated Diffusion
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Oxygen diffusion and thermal donor formation in silicon
U. G�sele, T. Y. Tan · Applied Physics A · 1982 · 283 citations
Diffusivity of oxygen in silicon at the donor formation temperature
Michael Stavola, J. R. Patel, L. C. Kimerling et al. · Applied Physics Letters · 1983 · 217 citations