U. G�sele

Point defects, diffusion processes, and swirl defect formation in silicon

T. Y. Tan, U. G�sele · Applied Physics A · 1985 · 450 citations

Materials Science, Point Defects, Engineering +9

Oxygen diffusion and thermal donor formation in silicon

U. G�sele, T. Y. Tan · Applied Physics A · 1982 · 282 citations

Applied Physics, Semiconductor Material, Semiconductor Device Fabrication +2

Thermal equilibrium concentrations and effects of negatively charged Ga vacancies in n-type GaAs

T. Y. Tan, H. M. You, U. G�sele · Applied Physics A · 1993 · 90 citations

Wide-bandgap Semiconductor, Electrical Engineering, Engineering +8

Pushing the limits of macroporous silicon etching

S. Matthias, F. M�ller, J. Schilling et al. · Applied Physics A · 2005 · 68 citations

Materials Science, Engineering, Microfabrication +8

Membranes for Micropumps from Macroporous Silicon

F. M�ller, A. Birner, J. Schilling et al. · physica status solidi (a) · 2000 · 67 citations

Pore Diameter, Pore Growth, Pore Structure +12