Statistics
Publications
2
Citations
136
H-Index
2
Active since
2000
Affiliations
F. M�ller is an author at Max Planck Institute of Microstructure Physics specializing in materials engineering, microfabrication, and materials science.
Publications per year
2000–2005
2
2
Pushing the limits of macroporous silicon etching
S. Matthias, F. M�ller, J. Schilling et al. · Applied Physics A · 2005 · 69 citations
Membranes for Micropumps from Macroporous Silicon
F. M�ller, A. Birner, J. Schilling et al. · physica status solidi (a) · 2000 · 67 citations
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