Round Robin: measurement of H implantation distributions in Si by elastic recoil detection
G. Boudreault,
R. G. Elliman,
R. Grötzschel,
S. C. Gujrathi,
C. Jeynes,
W. N. Lennard,
E. Raühala,
Timo Sajavaara,
H. Timmers,
Yu Wang,
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2004 · 27 citations · 38 references