2013 · 10 citations · 4 references
EngineeringBiomedical EngineeringSurgeryMicroelectromechanical SystemsMicrofabricationSurgical InstrumentationBiomedical Laser ApplicationsLaser SurgeryMems DesignMicrosurgical InstrumentationMicrosurgical InstrumentsOptical MemsElectrostatic MicromirrorsLaser Beam ShapingLaser MicromachiningMems MicromirrorsMems MirrorsMicro-scanning MirrorsMicromirrorsMicrosurgical Laser Instruments
We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.
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Microscanner with vertical out of plane combdrive
Thilo Sandner, D. Jung, David Kallweit et al. · 2011 · 19 citations
Engineering, Manufacturing Engineering, Mechanical Engineering +12
Cristian-Alexander Tulea, Jan Caron, Hud Wahab et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 12 citations · Full text