Microscanner with vertical out of plane combdrive

Abstract

This paper reports a new concept of quasi-static micro scanning mirrors enabling large static deflections and linearized scanning using vertical out-of-plane comb drives. The vertical combs are realized from a planar scanner substrate by a functionalized wafer bonding process The new device concept is highly flexible by design; different kinds of vertical combs (e.g. staggered and angular) can be realized without changing the process flow. First demonstrator devices are presented: a) quasi-static 1D-scanners with 4mm mirror diameter and 8° mechanical tilt angle for beam steering and b) a quasi-static / resonant 2D-scanner enabling 2D raster scanning with SVGA resolution.