Piezoelectric actuation of microbridges using AlN

The tension of metallic films deposited by electrolysis

G. Stoney · Proceedings of the Royal Society of London Series A Containing Papers of a Mathematical and Physical Character · 1909 · 4.8K citations · Full text

Natural Sciences, Chemistry, Materials Science +11

Proceedings of IEEE Ultrasonics Symposium

1994 · 547 citations

Natural Sciences, Computer Engineering, Petroleum Engineering +16

Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

M.-A. Dubois, Paul Muralt · Journal of Applied Physics · 2001 · 300 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

The determination of crystallite-size and lattice-strain parameters in conjunction with the profile-refinement method for the determination of crystal structures

Th. de Keijser, E. J. Mittemeijer, H. C. F. Rozendaal · Journal of Applied Crystallography · 1983 · 290 citations

Natural Sciences, Materials Engineering, Materials Science +17

Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators

H.P. Loebl, M. Klee, C. Metzmacher et al. · Materials Chemistry and Physics · 2003 · 152 citations

Natural Sciences, Materials Science, Physics +14