Concepedia

Publication | Closed Access

Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators

DOI

149

Citations

16

References

2003

Year

H.P. Loebl, M. Klee, C. Metzmacher, Willi A. Brand, R.F. Milsom, P. Lok
Materials Chemistry and Physics

References

YearCitations

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