Concepedia

Publication | Closed Access

Amorphization and solid phase epitaxy of high-energy ion implanted 6H-SiC

DOI

23

Citations

7

References

1997

Year

Manabu Ishimaru, Shinsuke Harada, Teruaki Motooka, Toshitake Nakata, Tomoaki Yoneda, Morio Inoue
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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