Characterization of scanning probe microscope tips for linewidth measurement

Abstract

For accurate linewidth measurement in scanning probe metrology the shape and size of the probe tip must be known. Since the probe can be degraded during a scan, quick in situ characterization is desirable. A technique is described employing an array of known structures that allows tip characterization with the probe microscope itself. This technique can be used to measure either the shape of a probe tip or the flexing caused by attractive forces near a sidewall. The results suggest that the sharpest probes may experience significant bending in the vicinity of a wall.