Concepedia

Technology and application of electro-depositable photo resists to create uniform coatings needed for complex 3D micro actuators and sensors

M. Feldmann, A. Waldschik, S. Büttgenbach

Microsystem Technologies · 2006 · 14 citations · 2 references

DOI

Concepts

References

2

Photoresist Coating Methods for the Integration of Novel 3-D RF Microstructures

Nga Pham, E. Boellaard, Joachim N. Burghartz et al. · Journal of Microelectromechanical Systems · 2004 · 94 citations

, , +15

Conformal coating by photoresist of sharp corners of anisotropically etched through-holes in silicon

M. Heschel, S. Bouwstra · Sensors and Actuators A Physical · 1998 · 45 citations · Full text

, , +13