Concepedia

Microlens lithography and smart masks

R. Völkel, Hans Peter Herzig, Ph. Nussbaum, Peter Blattner, R. Dändliker, E. Cullmann, W.B. Hugle

Microelectronic Engineering · 1997 · 14 citations · 4 references

Open access

Concepts

EngineeringManufacturing EngineeringMicroelectromechanical SystemsMicrofabricationPhotonicsMask DesignMask FabricationMems FabricationMicrofabrication ProcessesMicromachiningSoft LithographyDigital LithographyMask Design For MemsMaskless LithographyPhotolithography

References

4

Technique for monolithic fabrication of microlens arrays

Zoran D. Popović, Robert A. Sprague, G. A. N. Connell · Applied Optics · 1988 · 511 citations

Engineering, Manufacturing Engineering, Materials Science +13

Microlens array imaging system for photolithography

Optical Engineering · 1996 · 77 citations · Full text

Engineering, Manufacturing Engineering, Microelectromechanical Systems +12

Transferring resist microlenses into silicon by reactive ion etching

Martin Eisner · Optical Engineering · 1996 · 49 citations

Engineering, Materials Engineering, Materials Science +14

<title>Reactive ion etching of microlens arrays into fused silica</title>

Stefan Haselbeck, Martin Eisner, Horst Schreiber et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 10 citations

Engineering, Materials Engineering, Materials Science +15