Statistics
Publications
2
Citations
106
H-Index
2
Active since
1997
Affiliations
Suss Microoptics (Switzerland)(Current)
E. Cullmann is an author at Suss Microoptics (Switzerland) specializing in manufacturing engineering, microfabrication, and optical proximity correction.
Publications per year
1997–2010
2
2
Advanced mask aligner lithography: new illumination system
Reinhard Voelkel, Uwe Vogler, A. Bich et al. · Optics Express · 2010 · 92 citations · Full text
Natural Sciences, Manufacturing Engineering, Microfabrication +12
Microlens lithography and smart masks
R. Völkel, Hans Peter Herzig, Ph. Nussbaum et al. · Microelectronic Engineering · 1997 · 14 citations · Full text
Engineering, Manufacturing Engineering, Microelectromechanical Systems +12
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