Statistics
Publications
2
Citations
412
H-Index
2
Active since
1997
Affiliations
University of Neuchâtel(Current)
Ph. Nussbaum is an author at University of Neuchâtel specializing in micromachining, microelectromechanical systems, and microfabrication.
Publications per year
1997–1997
2
2
Microlens lithography and smart masks
R. Völkel, Hans Peter Herzig, Ph. Nussbaum et al. · Microelectronic Engineering · 1997 · 14 citations · Full text
Engineering, Manufacturing Engineering, Microelectromechanical Systems +12
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