Pure and Applied Optics Journal of the European Optical Society Part A · 1997 · 398 citations · 16 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationSensorsMems DesignMems FabricationMems SensorsMems TestingMicroelectromechanical SensorsMicromachiningMicrofabricated SensorsMicromachined SensorsMicroscale Sensing
We report on our activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems. Examples for chemical analysis systems (μTAS, blood gas sensor), neural networks and multiple pupil imaging systems for photolithography (microlens and smart mask lithography) are presented.
16