MRS Proceedings · 1989 · 10 citations · 6 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectronicsSemiconductor MaterialsThin FilmsComplementary Metal-oxide-semiconductor TechnologyMetal-oxide-semiconductor Field-effect TransistorsOxide SemiconductorsSemiconductor Device MaterialsSemiconductor Thin FilmsSilicon MaterialsGate Dielectric EngineeringLow-temperature DepositionLow-temperature FabricationSemiconductor Oxide Thin FilmsSilicon Thin Films
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The physics of semiconductor devices
H. L. Grubin · IEEE Journal of Quantum Electronics · 1979 · 2.8K citations