Two-dimensional quantitative mapping of arsenic in nanometer-scale silicon devices using STEM EELS–EDX spectroscopy

The quantitative analysis of thin specimens

G. Cliff, G. W. Lorimer · Journal of Microscopy · 1975 · 1.8K citations

Natural Sciences, Materials Engineering, Materials Science +16

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Natural Sciences, Materials Engineering, Materials Science +10

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Imaging of Arsenic Cottrell Atmospheres Around Silicon Defects by Three-Dimensional Atom Probe Tomography

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