Concepedia

Comparison of secondary electron emission in helium ion microscope with gallium ion and electron microscopes

K. Ohya, T. Yamanaka, K. Inai, T. Ishitani

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2008 · 37 citations · 9 references

DOI

Concepts

References

9

Helium ion microscope: A new tool for nanoscale microscopy and metrology

Bill Ward, John Notte, N. P. Economou · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 418 citations

, , +14

Energy loss rate and inelastic mean free path of low-energy electrons and positrons in condensed matter

J. C. Ashley · Journal of Electron Spectroscopy and Related Phenomena · 1990 · 159 citations

, , +16

Simulation Study on Image Contrast and Spatial Resolution in Helium Ion Microscope

K. Inai, Kaoru Ohya Kaoru Ohya, T. Ishitani · Journal of Electron Microscopy · 2007 · 48 citations

, , +12

Objective comparison of scanning ion and scanning electron microscope images

Tohru Ishitani, Hideki Tsuboi · Scanning · 1997 · 34 citations · Full text

, , +13

Comparative study of secondary electron emission from solids under positron and electron impacts

Kunihiro Nishimura, Jun Kawata, K. Ohya · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2000 · 31 citations

, , +15