T. Yamanaka

Comparison of secondary electron emission in helium ion microscope with gallium ion and electron microscopes

K. Ohya, T. Yamanaka, K. Inai et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2008 · 37 citations

Natural Sciences, Materials Science, Physics +8

Influence of Interface Roughness on Silicon Oxide Thickness Measured by Ellipsometry

S. Fang, W. Chen, T. Yamanaka et al. · Journal of The Electrochemical Society · 1997 · 31 citations

Engineering, Materials Engineering, Materials Science +17

The Evolution of (001) Si / SiO2 Interface Roughness during Thermal Oxidation

S. Fang, W. Chen, T. Yamanaka et al. · Journal of The Electrochemical Society · 1997 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +17

Secondary electron emission in scanning Ga ion, He ion and electron microscopes

T. Ishitani, T. Yamanaka, K. Inai et al. · Vacuum · 2010 · 24 citations

Natural Sciences, Materials Science, Physics +14

Modeling of charging effect on ion induced secondary electron emission from nanostructured materials

K. Ohya, Daiki Takami, T. Yamanaka · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 10 citations

Engineering, Materials Engineering, Materials Science +17