Phase transformations in metallization systems under conditions of nonstationary thermal action

Abstract

First-order phase transitions induced in aluminum metallization layers by the passage of single rectangular current pulses with amplitude up to 8 × 10 10 A/m 2 and durations within 100–1000 μs are considered. The formation of local fused zones and their subsequent migration during current passage have been experimentally studied. The main mechanisms of interphase boundary propagation due to heat evolution at the solid/liquid interface under conditions of nonstationary heating of the metal film are established. The velocity of liquid-phase propagation (∼25 m/s) along the metallization stripe has been determined in experiment and a method of calculating the length of a fused zone upon the current pulse passage is proposed.