Aluminum metallization for flat-panel displays using ion-beam-assisted physical vapor deposition

Topics in applied physics

Richard T. Brown · Proceedings of the IEEE · 1980 · 939 citations

Natural Sciences, Physics, Optical Materials +14

Control of thin film orientation by glancing angle ion bombardment during growth

Lock See Yu, James Harper, Jerome J. Cuomo et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 133 citations · Full text

Natural Sciences, Materials Science, Physics +16

Effects of grain orientation on hillock formation and grain growth in aluminum films on silicon substrates

John E. Sanchez, Eduard Arzt · Scripta Metallurgica et Materialia · 1992 · 129 citations

Natural Sciences, Materials Engineering, Materials Science +17

Hillock Growth and Stress Relief in Sputtered Au Films

William B. Pennebaker · Journal of Applied Physics · 1969 · 86 citations

Natural Sciences, Materials Engineering, Materials Science +15

Stochastic model for grain size versus dose in implanted and annealed polycrystalline silicon films on SiO2

R.B. Iverson, R. Reif · Journal of Applied Physics · 1985 · 56 citations · Full text

Engineering, Materials Engineering, Materials Science +17