Concepedia

High temperature chemical vapor deposition of aluminum nitride, growth and evaluation

M. Pons, R. Boichot, N. Coudurier, A. Claudel, E. Blanquet, S. Lay, F. Mercier, D. Pique

Surface and Coatings Technology · 2013 · 29 citations · 40 references

DOI

Concepts

References

40

Ultraviolet light-emitting diodes based on group three nitrides

Asif Khan, Krishnan Balakrishnan, Tom Katona · Nature Photonics · 2008 · 1K citations

, , +14

Substrates for gallium nitride epitaxy

L. Liu, James H. Edgar · Materials Science and Engineering R Reports · 2002 · 809 citations

, , +12

Growth of high purity AlN crystals

Glen A. Slack, T. McNelly · Journal of Crystal Growth · 1976 · 450 citations

, , +12

Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications

V. Cimalla, J. Pezoldt, O. Ambacher · Journal of Physics D Applied Physics · 2007 · 386 citations

, , +17

Piezoelectric aluminum nitride thin films for microelectromechanical systems

Gianluca Piazza, Valeriy Felmetsger, Paul Muralt et al. · MRS Bulletin · 2012 · 237 citations · Full text

, , +16